| Fluid |
Dry air, N2 (Air quality classes are JIS B 8392-1 1.1.2 to 1.6.2:2003, ISO8573-1 1.1.2 to 1.6.2) |
| Rated flow rate range (flow range) *1) |
0 to 0.5 L/min |
0 to 1 L/min |
0 to 3 L/min |
-0.5 to 0.5 L/min *2) |
-1 to 1 L/min *2) |
-3 to 3 L/min *2) |
| Accuracy |
±5% F.S. *3) |
| Repeatability |
±2% F.S. *3) |
| Pressure characteristics (0 kPa reference *4)) |
±2%F.S. (0 to 300 kPa) ±5%F.S. (-70 to 0 kPa) |
| Temperature characteristics (reference: 25¡C) |
±2%F.S. (15 to 35_) ±5%F.S. (0 to 50_) |
| Rated pressure range *5) |
-70 kPa to 300 kPa |
| Operating pressure range *6) |
-100 kPa to 400 kPa |
| Withstand pressure |
500 kPa |
| Analog Output (Non-linear output) |
Output voltage: 1 to 5 V, output impedance: Approx. 1 k½ |
| Response Time |
5 ms or less (90% response) |
| Power supply voltage |
12 to 24 V DC ±10% (with polarity protection) |
| Current Consumption |
16 mA or less |
| Environment |
Protective Enclosure |
IP40 |
| Operating Fluid Temperature |
0 to 50_ (No freezing or condensation) |
| Operating temperature range |
0 to 50_ (No freezing or condensation) |
| Storage temperature range |
-10 to 60_ (No freezing or condensation) |
| Operating Humidity Range |
35 to 85%R.H. (No condensation) |
| Storage Humidity Range |
35 to 85%R.H. (No condensation) |
| Withstand Voltage |
1,000 V AC for 1 min. between terminals and housing |
| Insulation Resistance |
50 M½ or more (500 V DC measured via insulation resistance tester) between terminals and housing |
| Port Size |
M5 _ 0.8 (Tightening torque: 1 to 1.5 N_m) |
| Wetted parts material |
PPS,Si,Au,SUS316,C3604 (Electrolytic nickel plating) |
| Standards |
CE UL,CSA |
| Lead |
3 core vinyl flexible cable ¿2.6 (diameter: 2.6 mm), 0.15 mm^2, 2 m |
| Weight |
10 g (It does not include lead) |